TFT - OLED - PDP: Several wet and dry cleaning steps are necessary to produce FPDs: Cleaning of the delivered glass panels, cleaning before spraying of the spacers, cleaning before applying polarisers. Ultrasonic and megasonic systems enhance the wet cleaning process. UV and IR modules are used for dry cleaning processes.

Inline-module for cleaning of TFT, OLED and PDD displays

• Uniform cleaning results over the entire panel surface due to stable nylon brushes
• Fully automatic adjustment of brushes with an accuracy of ±0.05mm, parallel to the glass panel
• Prevention of particle emission due to separation of all drive and bearing elements from the process chamber
• Cleaning results are enhanced due to ultrasonic, air jet and megasonic
• Improved wettability of substrates and removal of organic pollution due to integrated UV modules (dry cleaning)