The Flex Buffer stores wafers/cells in the buffer magazine during maintenance or troubleshooting work in the downstream machine. The buffer magazine is then moved up one slot, in order to pick up the next row of wafers/cells. In case of any malfunctions in the upstream machine, the stored wafers/cells are transported further on the principle of "first in, last out" (FILO). In normal operation the wafers/cells are conveyed through the buffer without interruption. Various independent speed-controlled belt units are able to create gaps so that, in addition to normal operation, the full magazines can be emptied to increase the throughput.

Inline module for the intermediate storage of wafers/cells

• Variable speed control
• Gentle wafer/cell transport
• Continuous wafer/cell pursuit
• Variable capacities
• Low maintenance expenses