The wafers/cells are transferred between the single process steps either manually or via Montrac system in special developed SCHMID Carriers. The full Carriers are positioned in the Loader in a row and moved to the transfer position. Here the wafers/cells are moved out of the carrier cases via an index system and subsequently conveyed to the process equipment. In reverse the Unloader receives the wafers/cells and assures a constant loading of the SCHMID Carriers. For this the wafers/cells are synchronized in rows on speed controlled conveyor belts and successively stored in the empty carrier cases via an index system.

Modules for the loading and unloading of process equipment

• Highest throughput on a small footprint
• Vibration free and safe wafer/cell transport
• Suitable for different wafer/cell sizes
• Low breakage rate < 0.1 %
• Suitable for very thin wafers/cells from 120 µm
• Easy integration into Montrac System