The Load Cell Line guarantees the loading of the cell line with high-quality undamaged wafers. The wafers are inspected for damages by various detection systems and subsequently fed into the cell production line. The Load Cell Line is available in various versions according to the required degree of automation and inspection.

Inline module for feeding wafers into a cell production line

• Wafer breakage control prior process start
• Breakage sort out prior and after measuring system
• Integration of different measuring tools
• Wafer and charge pursuit
• Gentle wafer handling and transport