The Multi Lane Loader caters for a continual loading and unloading of process systems. The wafers/cells are fed to the following machine on five tracks. Inside the loader, the wafers/cells are positioned in two drawers each with 5 compartments and gently singulated by a side nozzle bar. A Bernoulli gripper system with 5 grippers takes the wafers/cells from the currently active drawer and places them on the outgoing conveyor belt.

Module for the of loading and unloading process systems with wafers/cells

• Continual and safe loading
• Automatic singulation
• Easy operation and loading of the machine
• Very low breakage rate < 0.3%
• Low-maintenance mechanical design