In the PECVD Loader / Unloader the PECVD-processed wafers in the tray are exchanged for unprocessed wafers in a one step process. By dint of a system consisting of eight Bernoulli grippers the processed wafers are removed from the tray, inspected for breakage and placed on two outfeed conveyors. At the same time two infeed conveyors supply unprocessed wafers to the transfer position, here they are placed by the gripper system into the vacant tray positions. This process is repeated until the tray is completely refilled with unprocessed wafers.

Inline module for loading and unloading of a PECVD system

• Loading and unloading in one machine and one step
• Gentle wafer handling
• Low breakage rate <0.3 %
• Low maintenance and serving requirements