The coated wafers are removed from the processing trays and replaced with unprocessed wafers in the PECVD Loader/Unloader - especially designed for the PentaBlue PECVD System by Schmid. To guarantee throughput values of up to 3600 wafers per hour, there are always three trays per cycle at the same time in the machine. While the first tray is being loaded, processed wafers are unloaded from the second tray which is then cleaned. During this time, the third tray waits to be able to change immediately into unload position as soon as the first tray is conveyed into the PentaBlue. When the coating process has been completed, breakage control including removal is carried out while the wafers are being unloaded. For further quality assurance, the color homogeneity of the wafers can be measured at this stage and the respective measurement results added to the wafer ID.

Module for Loading/Unloading the PentaBlue PECVD System

• Loading, unloading and cleaning of the processing trays inside the machine
• Heat insulation of the chambers guarantees only minimal cooling of the trays during the loading and unloading process which reduces energy consumption and costs
• Connection to Montrac Intralogistics System possible
• Highest throughputs with lowest breakage rates
• Tray capacity: 100 wafers