PentaBlue is the Schmid PECVD (Plasma Enhanced Chemical Vapour Deposition) coating system where the wafers are coated with an antireflection layer consisting of silicon nitride. This technology uses a direct plasma reactor which achieves improved cell efficiency and higher density of Si-nitrate layer in comparison to the remote plasma reactor. The PentaBlue ensures an excellent surface passivation due to high process temperatures and the direct plasma process and guarantees a stable and reproducible process and is characterized by outstanding layer uniformity.

PentaBlue System for anti-reflection coating based on silicon nitride

• Excellent surface passivation due to high process temperatures and direct plasma
• Outstanding layer uniformity
• Stable and reproducible process
• Flexible, modular and scalable design
• Throughput of up to 3,600 wafers per hour