The system is equipped with four automatic cantilever system to load and unload each process tube separately. One tube can handle four quartz boats per run, each loaded with 50 wafers back to back. After the drive-in and the heat-up step, the process starts with a temperature stabilization. After that, nitrogen is used as carrier gas for the POCl3 liquid. An additional oxidation steps follows to finish the process. After the adjusted diffusion time the tube opens to get unloaded and reloaded again.

Batch system to create the p-n junction on texturized wafers

• Very high diffusion uniformity
• Class 10 compatible polished stainless steel scavenger
• Mass flow controlled gas system for each tube level
• Digital process and temperature controller for each tube level
• Back to back installation possible
• Fully automatic system available