In the application of thin-film layers on glass substrates and foils, substrate surfaces are cleaned in various quality grades, depending on the requirements of the following processes. With the aid of various system configurations, particles of up to a minimum diameter of 1 µm can be removed from the surface.

Inline system for cleaning glass surfaces

• Gentle and effective cleaning of glass surfaces by precisely adjusted and controlled process parameters.
• Optimal preparation of the surfaces for downstream processes by modular configurable system design.
• Processing of the glass substrate and foils with a high rate of process safety and system availability