Front contacts (TCO), which are deposited via PECVD do not normally have optimal light transmission and dispersion characteristics. In order to definably adjust the light dispersion and to increase the light output, the surface coating is structured using wet-chemical methods.

Inline system for structuring the surface of the front contact layer

• Effective structuring of the surface of the front contact layer with the aid of precisely adjustable and controllable process parameters.
• Consistent processing results due to optimal process guidance and distribution of the etching medium on the substrate surface.
• Processing the glass substrate with a high process safety rate and system availability.