The Conveyor is available in various lengths between 500 mm and 2000 mm and transports the wafers/cells on two, four or five lanes within the production line. As they are fed into the machine, the wafers/cells are aligned and registered by sensors for wafer/cell tracking. The individual control of each conveyor belt allows deceleration or acceleration of the wafers/cells on their individual track in order to synchronize the transfer to the following machine.

Inline module for the transport of wafers/cells

• Variable speed control of the belts (deceleration/acceleration)
• No mechanical strain on the wafers/cells
• Synchronization
• Optional breakage control and sort out
• Wafer/cell tracking and process control