The Diverter ensures the continuous loading of the following machine without interruption and thus an optimum throughput of the entire production line. In a separate module each the wafers are transferred on a total of three independent lanes to five conveyor belts.

Inline module for the synchronization of wafers

• Continuous feeding of the following equipment
• Stabilized and synchronized wafer transport
• Continuous wafer position monitoring
• Throughput of 3400 wafers per hour