The Diverter ensures the continuous loading of the following machine without interruption and thus an optimum throughput of the entire production line. The wafers are transferred on a total of four independent lanes to two conveyor belts of the Diverter. Afterwards the wafers are conveyed to five conveyor belts and removed from the Diverter on five tracks at an angle of 90°.

Inline module for the synchronization of wafers

• Continuous feeding of the following equipment
• Stabilized and synchronized wafer transport
• Continuous wafer position monitoring
• Throughput of 3000 wafers per hour