Metrology Sorter System

The system consists of a measuring and a sorting unit which contact-free inspects 3000 solar wafers per hour regarding the required quality criteria and subsequently sorts them into boxes. The following wafer characteristics are inspected/measured: geometry, cracks, break-outs, chamfers, surface impurity, deviating thickness, TTV, bending and saw damage.

Specifications

Inline module for the quality control of solar wafers

  • Various measuring stations for optimized wafer inspection
  • Excellent graphical display of the current measurements
  • Reduced risk of breakage due to minimized wafer handling during inspection and sorting
  • Immediate set-down in different styrofoam boxes (Schmid standard)
  • Connection to superordinate data transfer system OFC