Metrology Sorter System
The system consists of a measuring and a sorting unit which contact-free inspects 3000 solar wafers per hour regarding the required quality criteria and subsequently sorts them into boxes. The following wafer characteristics are inspected/measured: geometry, cracks, break-outs, chamfers, surface impurity, deviating thickness, TTV, bending and saw damage.
Specifications
Inline module for the quality control of solar wafers
- Various measuring stations for optimized wafer inspection
- Excellent graphical display of the current measurements
- Reduced risk of breakage due to minimized wafer handling during inspection and sorting
- Immediate set-down in different styrofoam boxes (Schmid standard)
- Connection to superordinate data transfer system OFC



