In alkaline etching using recirculation technology, chemicals and gases are fed back to the process in a regeneration procedure and the etched copper is recycled.

Inline system for the regeneration of alkaline etching chemicals and copper in a closed-loop system

• Reduced operation costs due to closed loop system with minimized consumption
• Etching speed increased by 30% and etch factor increased up to 5
• Consistent etching speed due to precise parameter control which leads to reduced defect rates
• No need for transportation of hazardous waste etching solution
• On-site recovery of the copper with a purity grade of over 99.5%